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Thin film transistor device (TFT) comprising stacked oxide semiconductor layers and having a surrounded channel structure
专利权人:
Semiconductor Energy Laboratory Co., Ltd.
发明人:
Kobayashi Yoshiyuki,Matsuda Shinpei,Yamazaki Shunpei
申请号:
US201514788940
公开号:
US9461179(B2)
申请日:
2015.07.01
申请国别(地区):
美国
年份:
2016
代理人:
Fish & Richardson P.C.
摘要:
A semiconductor device having stable electric characteristics is provided. The transistor includes first to third oxide semiconductor layers, a gate electrode, and a gate insulating layer. The second oxide semiconductor layer has a portion positioned between the first and third oxide semiconductor layers. The gate insulating layer has a region in contact with a top surface of the third oxide semiconductor layer. The gate electrode overlaps with a top surface of the portion with the gate insulating layer positioned therebetween. The gate electrode faces a side surface of the portion in a channel width direction with the gate insulating layer positioned therebetween. The second oxide semiconductor layer includes a region having a thickness greater than or equal to 2 nm and less than 8 nm. The length in the channel width direction of the second oxide semiconductor layer is less than 60 nm.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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