Provided is a vacuum processing device which allows a carrier to be easily transported therein and thereout. While a guide portion (48) of a rail device (10) is held by a travel portion (32) of a carrier (30) placed on a transport vehicle (40), the transport vehicle (40) is moved. An elevatable portion (23) is lowered so that the carrier (30) is suspended from a chamber exterior portion (16) of the rail device (10). Then the transport vehicle (40) is backed away so that the elevatable portion (23) and undercarriage (22) are no longer directly below the carrier (30). With a connection portion (14) in a connected state, the carrier (30) is suspended from a chamber interior portion (15) connected to the chamber exterior portion (16) and moved to the inside of a vacuum chamber (8). The connection portion is brought into a separated state, and the vacuum chamber (8) is sealed by a lid device (9). It is thereby possible for the carrier (30) to be transported in and out using narrow space.
