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Sensor element, force detection device, robot, electronic component transport device, electronic component inspection device, and component processing device
专利权人:
Seiko Epson Corporation
发明人:
Mizushima Nobuyuki,Kamiya Toshiyuki,Kawai Hiroki
申请号:
US201414524481
公开号:
US9546918(B2)
申请日:
2014.10.27
申请国别(地区):
美国
年份:
2017
代理人:
Harness, Dickey & Pierce, P.L.C.
摘要:
A sensor element includes, when three axes orthogonal to one another are set to be an A-axis, a B-axis, and a C-axis, first piezoelectric plate that is configured to have an X cut quartz crystal plate and outputs a charge in response to an external force along the A-axis direction, second piezoelectric plate that is configured to have a Y cut quartz crystal plate, is stacked in the A-axis direction with the first piezoelectric plate, and outputs a charge in response to the external force in the B-axis direction, and third piezoelectric plate that is configured to have a Y cut quartz crystal plate, is stacked in the A-axis direction so as to interpose the second piezoelectric plate between the first piezoelectric plate and the third piezoelectric plate and be arranged to turn around the A-axis, and outputs a charge in response to the external force in the C-axis direction.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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