Daiki ANRAKU,Tomomasa ITARASHIKI,Haijun ZHANG,Guoqiang QU,Min YANG
申请号：
US16603919
公开号：
US20200121817A1
申请日:
2018.04.10
申请国别(地区):
US
年份:
2020
代理人:
摘要：
A sterilization apparatus includes a sterilization chamber, a vaporization chamber, a wall partitioning the vaporization chamber into a first chamber and a second chamber, a first passage connecting the first chamber and the second chamber, a table arranged in the first chamber, a nozzle arranged toward the table to spray a sterilizing agent toward the table, a liquid reservoir for storing the liquid component of the sterilizing agent sprayed toward the table, a second passage connecting the second chamber and the sterilization chamber, and a means for decompressing the sterilization chamber and also decompressing the first chamber and the second chamber of the vaporization chamber through the first passage and the second passage, wherein the first passage is formed by a belt-shaped gap having a small thickness and a large width.
