Systems and methods are described for rapid sterilization of items in a vacuum or sterilization chamber. Embodiments include conductively heated, vacuum-based sterilization approaches that can be applied to devices, such as medical devices, electronic devices, and other suitable devices. For example, an item that has been exposed to excessive contamination is placed inside the sterilization chamber. The chamber can be depressurized to a vacuum level sufficient to gasify liquids inside a solid matrix holding a liquid sterilant, and the item can be conductively heated at least to replace latent heat of vaporization lost during the depressurization. Some embodiments include techniques relating to quality processing, monitoring and feedback control, and/or other functionality.
