IN-SITU LASER ASSISTED PROCESSES IN FOCUSED ION BEAM APPLICATIONS

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专利权人:

INTEL CORPORATION

发明人:

TAN, Shida,LIVENGOOD, Richard H.

申请号：

WO2016US25223

公开号：

WO2017062060(A1)

申请日:

2016.03.31

申请国别(地区):

世界知识产权组织国际局

年份:

2017

代理人:

摘要：

In-situ laser assisted processes in focused ion beam applications are described. In an example, a method of patterning, milling, or imaging a sample involves providing real time localized substrate heating using a pulsed focused laser beam that irradiates the sample simultaneously as the ion beam is used during the patterning, milling, or imaging. Other embodiments may be described and/or claimed.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/