PROBLEM TO BE SOLVED: To estimate a relationship between a plasma and effect to an object to be irradiated.SOLUTION: A plasma irradiation processing device includes: a plasma generation part for generating a plasma a measurement part for measuring a current value flowing via the object to be irradiated while the plasma is radiated to the object to be irradiated and an evaluation part for producing a correlation between a current value of the current and coagulation ability of the plasma.SELECTED DRAWING: Figure 1COPYRIGHT: (C)2017,JPO&INPIT【課題】プラズマと照射対象物への効果との関係を推定する。【解決手段】プラズマ照射処理装置は、プラズマを生成するプラズマ生成部と、前記プラズマを照射対象物に照射している間に前記照射対象物を介して流れる電流値を測定する測定部と、前記電流の電流値と前記プラズマの凝固能との相関関係を作成する評価部とを備える。【選択図】図1