SPRAY UNIT FOR FILM DEPOSITION DEVICE AND FILM DEPOSITION DEVICE
- 专利权人:
- DAIKIN IND LTD
- 发明人:
- OKUMOTO MAMORU
- 申请号：
- JP20140011809
- 公开号：
- JP2015136694(A)
- 申请日:
- 2014.01.24
- 申请国别(地区):
- 日本
- 年份:
- 2015
- 代理人:
- 摘要：
PROBLEM TO BE SOLVED: To facilitate fitting work of a plurality of nozzles to which a small-diameter pipe is connected which is provided at an electrostatic atomization type film deposition device to the film deposition device.SOLUTION: A spray unit 40 provided at an electrostatic atomization type film deposition device includes a plurality of sprayers 42 and a support member 41 on which the plurality of sprayers 42 are mounted. Each sprayer 42 of the spray unit 40 is configured by: a metal spray pipe 51 in which a tip part configures a nozzle part for spraying a supplied raw material liquid and the remaining portion configures a small-diameter pipe part for decompressing the raw material liquid supplied to the nozzle part; and a reinforcement part 56 which is formed by a resin material and which covers the entire outer periphery of the small-diameter pipe part of the spray pipe 51.
- 来源网站：
- 中国工程科技知识中心
