MICROTOME UTILIZING A MOVABLE KNIFE IN A RETARDATION FIELD SCANNING ELECTRON MICROSCOPE AND A RETARDATION FIELD SCANNING ELECTRON MICROSCOPE INCLUDING THE SAME
- 专利权人:
- GATAN, INC.
- 发明人:
- GALLOWAY, SIMON, ANDREW
- 申请号:
- EP20120712166
- 公开号:
- EP2681756(B1)
- 申请日:
- 2012.03.01
- 申请国别(地区):
- 欧洲专利局
- 年份:
- 2015
- 代理人:
- 摘要:
A microtome for in situ residence within a chamber of a scanning electron microscope (SEM) and a SEM including the microtome is disclosed. The microtome includes a specimen holder for holding a specimen thereon at high voltage to produce a retardation field thereat and a movable knife. The SEM includes a backscatter electron detector disposed adjacent to specimen holder. The knife arranged is to be carried into engagement with the specimen on the specimen holder to slice a portion of the specimen away to expose a new face of the specimen without interfering with the high voltage on the specimen, and is mounted so that after having engaged the specimen to expose a new face of the specimen it is withdrawn to a retracted position whereupon it does not interfere with the retardation field.
- 来源网站:
- 中国工程科技知识中心