PROBLEM TO BE SOLVED: To provide a cathode luminescence measuring device capable of implementing high-resolution observation with an electron microscopy and high-resolution observation of cathode luminescence despite of simple configuration. SOLUTION: The device 1 for measuring a cathode luminescence CL generated by irradiating an electron ray EB to a sample W includes an electromagnetic objective lens 75 for converging the electron ray EB to be irradiated to the sample W and a condensing mirror section 411 for condensing cathode luminescence CL generated from the sample W to which the electron ray EB is irradiated, and is characterized by preparing the condensing mirror section 411 above the terminal at the sample W side of the electromagnetic objective lens 75 to apply a stray magnetic field from the electromagnetic objective lens 75 to the sample W. COPYRIGHT: (C)2008,JPO&INPIT
