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ION EXCHANGE RESINS, PURIFICATION METHODS AND METHODS OF MAKING IONIC RESINS
专利权人:
Rohm and Haas Electronic Materials LLC
发明人:
Rudenko Andrey,Pohlers Gerhard
申请号:
US201816164175
公开号:
US2019126264(A1)
申请日:
2018.10.18
申请国别(地区):
美国
年份:
2019
代理人:
摘要:
An ion exchange resin comprises a crosslinked resin and a salt covalently bonded to a carbon of the resin, wherein the salt comprises a first non-metallic cation and a first counteranion, wherein the first counteranion comprises a second non-metallic cation and a thiosulfate counteranion, and wherein the ion exchange resin is essentially free of metals. The ion exchange resin finds particular use in the removal of impurities from solutions that are useful in the manufacture of semiconductor devices.
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