PROBLEM TO BE SOLVED: To provide a hole inside inspection device capable of shortening an inspection time, and improving inspection accuracy. SOLUTION: This hole inside inspection device 1 for inspecting existence of a foreign substance 9 inside a hole 20 is equipped with a restriction device 4 having an opening 41 having the same shape and the same size as the hole 20, a laser light source 3 for irradiating the hole through the opening with laser light, a CCD camera 6 for receiving the laser light from the hole, and a determination device 7 for determining existence of a foreign substance based on the laser light received by the CCD camera 6. Hereby, focusing of the CCD camera performed hitherto by an objective lens is not required, to thereby shorten the inspection time. Since the laser light reflected by the hole is irradiated to a light receiving element of the CCD camera without the aid of the objective lens, and the laser light to be received is parallel to an optical axis, a dead angle at which inspection is impossible is not generated inside the hole, to thereby improve the inspection accuracy. COPYRIGHT: (C)2008,JPO&INPIT
