COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
发明人:
DELAUNAY, Marc,GHIS, Anne
申请号：
WO2016FR52763
公开号：
WO2017072434(A1)
申请日:
2016.10.25
申请国别(地区):
世界知识产权组织国际局
年份:
2017
代理人:
摘要：
The invention concerns a device for producing an amorphous carbon layer by electron cyclotron resonance plasma, the device comprising: - a plasma chamber (3); - means for conveying a gas (4), - a magnetic mirror (15), - a waveguide (5) extending along a reference axis; - means (1) for injecting microwave power; - means (2) for generating a magnetic field in the plasma chamber (3), the means (2) for generating the magnetic field being configured to create a beam (13) of magnetic field lines along which plasma is diffused; - a target (9) made from carbon; - a substrate holder (10); characterised in that the target (9) is arranged at a distance from the reference axis (14) of between Rcible/2 and Rcible, and in that the device further comprises a screen (8) arranged between the waveguide (5) and the substrate holder (10).
