Femtosecond laser processing system with process parameters controls and feedback

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专利权人:

IMRA AMERICA, INC.

发明人:

Harter Donald J.

申请号：

US201514837619

公开号：

US9774160(B2)

申请日:

2015.08.27

申请国别(地区):

美国

年份:

2017

代理人:

Sughrue Mion, PLLC `Turner Richard C.

摘要：

A femtosecond laser based laser processing system having a femtosecond laser, frequency conversion optics, beam manipulation optics, target motion control, processing chamber, diagnostic systems and system control modules. The femtosecond laser based laser processing system allows for the utilization of the unique heat control in micromachining, and the system has greater output beam stability, continuously variable repetition rate and unique temporal beam shaping capabilities.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/