PROBLEM TO BE SOLVED: To provide a small ultraviolet irradiation device which has simplified means for cooling a light source.SOLUTION: An ultraviolet irradiation device 100 comprises: a treatment vessel 12 for accommodating a product to be treated therein a light source 18 which is provided in the treatment vessel 12 and irradiates the product to be treated with an ultraviolet ray a vacuum pump 22 for decompressing an inner part of the treatment vessel 12 and a ventilation part in which air to be inhaled by the vacuum pump 22 passes so as to cool the light source 18. The ultraviolet irradiation device 100 further comprises a housing 10 for accommodating the treatment vessel 12 therein. The ventilation part 20 may be formed by a space between the treatment vessel 12 and the housing 10.COPYRIGHT: (C)2014,JPO&INPIT【課題】光源を冷却する手段を簡素化した小型の紫外線照射装置の提供にある。【解決手段】紫外線照射装置100は、被処理物を入れる処理容器12と、処理容器12に設けられ、被処理物に紫外線を照射する光源18と、処理容器12の内部を減圧する真空ポンプ22と、真空ポンプ22により吸引される空気が光源18を冷却するように流れる通気部と、を備える。処理容器12が収容される筐体10をさらに備え、通気部20は、処理容器12と筐体10の間の空間により形成されてもよい。【選択図】図2
