PROBLEM TO BE SOLVED: To provide a small-sized excimer lamp device by enhancing, in simple configuration, ignition startability of a thin-diameter excimer lamp of which the inner diameter of a discharge container is 20 mm or less.SOLUTION: In an excimer lamp device 1, a starting aid light source 4 which enhances ignition startability by irradiating a discharge gas of an excimer lamp 2 with ultraviolet rays is disposed towards the excimer lamp 2 in such a manner that a distance between an ultraviolet ray radiation plane of the starting aid light source 4 and an ultraviolet ray radiation plane of the excimer lamp 2 becomes such a distance that the starting aid light source 4 is not substantially irradiated with ultraviolet rays radiated from the excimer lamp 2 and that the excimer lamp 2 is irradiated with ultraviolet rays radiated from the starting aid light source 4.SELECTED DRAWING: Figure 1【課題】本発明により解決しようとする課題は、放電容器の内径が２０ｍｍ以下であるような細径のエキシマランプの点灯始動性を簡素な構成により改善した小型のエキシマランプ装置を提供することである。【解決手段】本発明のエキシマランプ装置１は、エキシマランプ２の放電用ガスに紫外線を照射して点灯始動性を改善する始動補助光源４の紫外線放射面とエキシマランプ２の紫外線放射面との距離が、エキシマランプ２から放射される紫外線が始動補助光源４には実質的に照射されず、始動補助光源４から放射される紫外線がエキシマランプ２に照射される距離となるように、始動補助光源４をエキシマランプ２に向けて配設した。【選択図】図１
