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ANGULAR VELOCITY SENSOR, SENSOR ELEMENT, AND MULTI-AXIS ANGULAR VELOCITY SENSOR
专利权人:
KYOCERA CORPORATION
发明人:
SOEJIMA, Munetaka
申请号:
WO2017JP26389
公开号:
WO2018021166(A1)
申请日:
2017.07.21
申请国别(地区):
世界知识产权组织国际局
年份:
2018
代理人:
摘要:
An angular velocity sensor has a piezoelectric body, a drive circuit, and a detection circuit. The piezoelectric body has a frame, a pair of drive arms, and a detection arm. The frame is supported by a pair of supported sections separated from each other in the x axis direction. The pair of drive arms extend, in parallel in the y axis direction, from the frame at positions between the pair of supported sections and mutually separated in the x axis direction. The detection arm extends in the y axis direction from the frame at a position between the pair of drive arms in the x axis direction. The drive circuit applies voltages of mutually inverse phases to the pair of drive arms, such that the pair of drive arms bend towards mutually opposite sides in the x axis direction and vibrate. The detection circuit detects signals generated as a result of bending deformation in the z axis direction of the detection arm.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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