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MEMS vibrating-beam accelerometer with piezoelectric drive
专利权人:
Honeywell International Inc.
发明人:
Strehlow John,MacGugan Doug
申请号:
US201113019913
公开号:
US9759739(B2)
申请日:
2011.02.02
申请国别(地区):
美国
年份:
2017
代理人:
Shumaker & Sieffert, P.A.
摘要:
A high-temperature drive component for a double-ended tuning fork (DETF). The drive component attaches to a surface of at least one of the tines. The drive component includes at least one piezoelectric trace sandwiched at least partially between two electrical traces. At least one of the tines includes a doped silicon base with drive component located thereon. One of the electrical traces is electrically connected to the doped silicon base and the other is electrically isolated from the doped silicon base.
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