ION TRAJECTORY MANIPULATION ARCHITECTURE IN AN ION PUMP

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专利权人:

Edwards Vacuum, LLC

发明人:

WYNOHRAD, Anthony,LANGEBERG, Joel

申请号：

EP20170187555

公开号：

EP3293753(A1)

申请日:

2017.08.23

申请国别(地区):

欧洲专利局

年份:

2018

代理人:

摘要：

An ion pump includes an anode, a backing surface having at least one surface structure extending toward the anode and a cathode positioned between the anode and the backing surface and having an opening such that the at least one surface structure is aligned with the opening.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/