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Curved Grating Structure Manufacturing Method, Curved Grating Structure, Grating Unit, And X-Ray Imaging Device
专利权人:
KONICA MINOLTA; INC.
发明人:
Mitsuru YOKOYAMA
申请号:
US15031598
公开号:
US20160265125A1
申请日:
2014.10.02
申请国别(地区):
US
年份:
2016
代理人:
摘要:
In one aspect, the present invention provides a curved grating structure manufacturing method which comprises: a grating forming step of forming, in one surface of a grating-forming workpiece, a grating region in which a plurality of members mutually having the same shape are periodically provided; a stress layer forming step of forming a stress layer capable of generating stress, on a grating plane-defining surface of the grating region; a boding step of bonding a support substrate to the stress layer; a polishing step of polishing the other surface of the grating-forming workpiece on a side opposite to the one surface having the support substrate bonded thereto; and a peeling step of peeling off the support substrate from the stress layer, wherein the polishing step includes performing the polishing to allow the grating-forming workpiece to be curved by a stress arising from the stress layer, after the peeling step.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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