ION EXCHANGE RESINS, PURIFICATION METHODS AND METHODS OF MAKING IONIC RESINS

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专利权人:

ROHM & HAAS ELECTRONIC MATERIALS LLC

发明人:

ANDREY RUDENKO,GERHARD POHLERS

申请号：

JP20180197181

公开号：

JP2019081885(A)

申请日:

2018.10.19

申请国别(地区):

日本

年份:

2019

代理人:

摘要：

To provide ion exchange resins, methods of their manufacture, purification media formed from the ion exchange resins, and purification methods using the ion exchange resins.SOLUTION: An ion exchange resin comprises a crosslinked resin and a salt covalently bonded to carbon of the resin, where the salt comprises a first non-metallic cation and a first counteranion, where the first counteranion comprises a second non-metallic cation and a thiosulfate counteranion, and where the ion exchange resin is essentially free of metals. The ion exchange resin finds particular use in the removal of impurities from solutions that are useful in the manufacture of semiconductor devices.SELECTED DRAWING: Figure 1

来源网站：

中国工程科技知识中心

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http://www.ckcest.cn/home/