NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY ;SIJTECHNOLOGY, INC.
发明人:
SHIRAKAWA Naoki,MURATA Kazuhiro
申请号：
US201515503609
公开号：
US2017239730(A1)
申请日:
2015.08.11
申请国别(地区):
美国
年份:
2017
代理人:
摘要：
A processing device for a metal material, containing: an airtight container for housing a specimen thereinside; an oxygen pump for extracting oxygen molecules from a gas discharged from the airtight container; a circulation means for returning the gas into the airtight container; and a plasma generation means present inside the airtight container for converting the gas returned from the circulation means into plasma and exposing the specimen thereto.
