PROBLEM TO BE SOLVED: To provide a substrate recovery apparatus for recovering a substrate by puncturing the substrate with a needle with optimum conditions in any cases, without being affected by a state of a sheet.SOLUTION: A substrate recovery apparatus 1 comprises: a plurality of substrates 2 having conducting properties a sheet member 3 having insulating properties, on a surface of which the substrates 2 are attached a stage 4 that holds the sheet member 3 in a substantially horizontal direction with the substrates 2 facing the downward direction a plurality of needle members 8 having conducting properties and each having a needle point 8a capable of puncturing the sheet member 3 a drive section 10 that holds the needle members 8 with the needle points 8a facing the downward direction above the stage 4 and moves the needle members 8 in a longitudinal direction and a conduction detecting section 6 that detects conduction among the needle members 8. The needle points 8a of the needle members 8 are arranged within an area smaller than a surface of one of the substrates 2 that is attached on the sheet member 3 on the substantially the same plane crossing in the longitudinal direction. The drive section 10 makes the needle members 8 kept insulated from each other.COPYRIGHT: (C)2014,JPO&INPIT【課題】シートの状態に依らずに常に最適な条件で針によって基板を打ち抜いて回収する。【解決手段】導電性を有する複数の基板2と、該複数の基板2が一方の面に接着される絶縁性を有するシート部材3と、複数の基板2を下方に向けてシート部材3を略水平方向に保持するステージ4と、導電性を有するとともにシート部材3を貫通可能な針先8aを有する複数の針部材8と、ステージ4の上方において、針先8aを下方に向けて複数の針部材8を保持し、これら複数の針部材8を長手方向に移動させる駆動部10と、複数の針部材8間の導通を検知する導通検知部6とを備え、複数の針8の針先8aが、長手方向に交差する略同一平面上において1つの基板2のシート部材3に接着される側の面よりも狭い範囲内に配置され、駆動部10が、複数の針部材8を互いに絶縁状態に保持する基板回収装置1を提供する。【選択図】図1
