A capsule for the transfer of a target material in a conveying system between a target irradiation station and a collecting station comprising: a beamline channel for the passage of an energetic beam irradiating the target material, a target holder holding the target material or a substrate backing the target material at a glancing angle with respect to the beamline channel axis, a degrader foil positioned across the beamline channel for degrading an energy of the energetic beam upstream of the target material, a target cooling inlet and a target cooling outlet for passage of a cooling fluid in a target cooling duct in a vicinity of the target holder such that the target material can be cooled during an irradiation, and a degrader foil cooling inlet and a degrader foil cooling outlet for passage of a cooling gas in a vicinity of the degrader foil.
