Forming conductive portions in insulating materials matreials using an ion beam

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专利权人:

MONASH UNIVERSITY

发明人:

Majumder Mainak,Fu Jing,Lobo Derrek E

申请号：

US201314408899

公开号：

US9558887(B2)

申请日:

2013.06.21

申请国别(地区):

美国

年份:

2017

代理人:

Brush David D.`Westman, Champlin & Koehler, P.A.

摘要：

A method of forming a conductive portion in an insulating material. The insulating material includes carbon and at least one other constituent. The method includes exposing the insulating material to ions to preferentially remove the other constituent.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/