A charged particle beam device has: a charged particle source for emitting charged particle beams (12); an acceleration power supply connected to the charged particle source, said acceleration power supply accelerating the charged particle beams (12); a second objective lens (26) for focusing the charged particle beams (12) on a sample (23); and a second detector (110). The second objective lens (26) is installed on the opposite side from where the charged particle beams (12) impinge on the sample (23). Electromagnetic waves emitted from the sample (23) in concert with the impinging of the charged particle beams (12) and/or electromagnetic waves reflected by the sample (23) impinge on the second detector (110). The second detector (110) detects the impinged electromagnetic waves.
