PROBLEM TO BE SOLVED: To provide a phase grating or the like used for X-ray phase imaging, capable of shortening a distance between the phase grating and a bright/dark cyclic images by turning the thickness of the striped structure part of a diffraction grating configuring the phase grating to a prescribed thickness in the relation between the phase grating and the intensity distribution of X-rays within a parallel plane.SOLUTION: The phase grating is used for the X-ray phase imaging. The phase grating is provided with a diffraction grating configured by cyclically arraying linear striped structure parts parallel to each other at a fixed interval, wherein the striped structure part of the diffraction grating has the width in a direction vertical to the permeating direction of the X-rays and the thickness in the same direction as the permeating direction of the X-rays, and the thickness of the striped structure part is set to the thickness for shifting a phase for a required amount to the permeating X-rays in order to turn the intensity distribution of the X-rays within the plane parallel to the phase grating to a prescribed intensity, and the diffraction grating has such a structure that the striped structure parts are shifted from each other and laminated in the cycle direction of the array.COPYRIGHT: (C)2010,JPO&INPIT【課題】位相格子と平行な面内でのX線の強度分布との関係において、位相格子を構成する回折格子の縞状構造部の厚さを、所定の厚さとすることによって、位相格子と明暗周期像との距離の短縮化を図ることが可能となるX線位相イメージングに用いられる位相格子等を提供する。【解決手段】X線位相イメージングに用いられる位相格子であって、前記位相格子は、互いに平行な直線状の縞状構造部が一定の間隔で周期的に配列されて構成された回折格子を備え、前記回折格子の縞状構造部は、X線が透過する方向に対し垂直な方向の幅と該X線の透過する方向と同方向の厚さを有し、該縞状構造部の厚さは、前記位相格子と平行な面内でのX線の強度分布を所定強度にするために、前記透過するX線に対して位相を必要量シフトさせる厚さに設定され、前記回折格子が、前記縞状構造部が配列されている周期方向に互いにずらして積層された構造を有する構成とする。【選択図】 図3