The Talbot-Low interferometer according to the present invention comprises a vibration imparting member for imparting vibration to zeroth, first and second gratings and said 0th grating, wherein said 0th grating is movable in said first direction, And is rotatable around a second axis extending in a second direction orthogonal to the first direction and around a third axis extending in a third direction orthogonal to the first and second directions respectively, The first and second gratings are fixed to each other in a state where the first and second gratings are parallel to each other with a predetermined distance therebetween, the vibration imparting member vibrates the 0th grating in the first direction, And vibrates around the axis and around the third axis, respectively.本発明にかかるタルボ・ロー干渉計は、第0、第1および第2格子および前記第0格子に振動を付与する振動付与部材を備え、前記第0格子は、前記第1方向に移動可能、且つ、前記第1方向に直交する第2方向に延びる第2軸回り、および、前記第1および第2方向それぞれに直交する第3方向に延びる第3軸回りにそれぞれ回動可能であり、前記第1および第2格子は、互いに所定距離を隔てて互いに平行になった状態で、互いに固定され、前記振動付与部材は、前記第0格子を前記第1方向に振動させ、且つ、前記第2軸回りと前記第3軸回りとのそれぞれに振動させる。
