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Method to coat NFT area with highly thermal conducting material in HAMR structure
专利权人:
HGST Netherlands B.V.
发明人:
Eduardo Torres,Cherngye Hwang,Randy Simmons
申请号:
GB20160011768
公开号:
GB2552005(A)
申请日:
2016.07.06
申请国别(地区):
英国
年份:
2018
代理人:
摘要:
A method for forming a heat assisted magnetic recording (HAMR) head 201 includes depositing a drop-on-demand mask on a portion of a surface of a near field transducer (NFT) 228. A first protective layer 218 is deposited over a remaining portion of the NFT and over the drop-on-demand mask. The drop-on-demand mask and a portion of the first protective layer disposed on the drop-on-demand mask are removed, exposing at least the portion of the NFT. A second protective layer 220 is deposited on the first protective layer and at least the exposed portion of the NFT. By using a drop-on-demand tool e.g. inkjet printer to deposit the mask, the alignment between the drop-on-demand mask and the portion of the NFT is less stringent, and the mask can be easily removed using a wiping tool. The first protective layer may be diamond like carbon (DLC) and the second protective layer may be aluminium nitride (AlN) having high thermal conductivity. The protective layers form an overcoat 216 which may also be formed on an end of
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