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DRYNESS/WETNESS RESPONSE SENSOR HAVING HIGH-SPEED RESPONSE AND HIGH SENSITIVITY
专利权人:
National Institute for Materials Science
发明人:
KAWAKITA, Jin,SHINOHARA, Tadashi,CHIKYO, Toyohiro,NABATAME, Toshihide,OHI, Akihiko,OHKI, Tomoko
申请号:
EP20150824136
公开号:
EP3173778(A4)
申请日:
2015.07.21
申请国别(地区):
欧洲专利局
年份:
2018
代理人:
摘要:
The present invention improves the sensitivity and the responsiveness of a dryness/wetness responsive sensor utilizing a galvanic current, allowing for downsizing of the dryness/wetness responsive sensor. Instead of the conventional structure in which an anode electrode and a cathode electrode are stacked with an intervening insulator, the present invention employs a structure in which both electrodes run in juxtaposition with each other on an insulating substrate in the form of, for example, a comb-shaped electrode as shown in the drawing. By utilizing a semiconductor manufacturing process or any other micro/nano-fabrication technology, an inter-electrode distance can be extremely shortened as compared with the conventional sensors, allowing enhancing the sensitivity per unit footprint of the electrodes. Accordingly, a decrease in the size of the dryness/wetness responsive sensor can be easily achieved.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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