FLOW RATE CONTROL DEVICE, METHOD OF CALIBRATING FLOW RATE OF FLOW RATE CONTROL DEVICE, FLOW RATE MEASURING DEVICE, AND METHOD OF MEASURING FLOW RATE USING FLOW RATE MEASURING DEVICE

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专利权人:

FUJIKIN INCORPORATED

发明人:

SAWADA Yohei,NAGASE Masaaki,NISHINO Kouji,IKEDA Nobukazu

申请号：

WO2017JP23013

公开号：

WO2018008420(A1)

申请日:

2017.06.22

申请国别(地区):

世界知识产权组织国际局

年份:

2018

代理人:

摘要：

In a method of calibrating a flow rate control device in which flow rate calibration is performed on the basis of a comparison with a flow rate measured using a flow rate reference apparatus, a prescribed permitted error range is set with respect to a plurality of flow rate settings, and the permitted error range of at least one specific flow rate setting from among the plurality of flow rate settings is set to be smaller than the prescribed permitted error range.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/