DROPLET TRANSFER DEVICE, DROPLET TRANSFER METHOD, PLASMA SEPARATION DEVICE AND PLASMA SEPARATION METHOD
- 专利权人:
- TOKYO ELECTRON LIMITED
- 发明人:
- TAMURA AKITAKE
- 申请号：
- KR20137003568
- 公开号：
- KR20130041202(A)
- 申请日:
- 2011.07.06
- 申请国别(地区):
- 韩国
- 年份:
- 2013
- 代理人:
- 摘要：
A droplet can be moved along a surface of a moving surface forming member in a simple method. At both sides of the moving surface forming member 1 configured to form a moving surface on which the droplet is moved and made of a nonmagnetic material, magnetic field forming members 4A and 4B configured to form a magnetic field gradient such that intensity of a magnetic field decreases as a distance from an area where the droplet is positioned on the surface of the moving surface forming member 1 increases along the surface is provided. By relatively moving the moving surface forming member 1 with respect to the magnetic field forming members 4A and 4B along the surface, the droplet is moved along the magnetic field gradient.
- 来源网站：
- 中国工程科技知识中心
