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METAL LANDING ON TOP ELECTRODE OF RRAM
专利权人:
Taiwan Semiconductor Manufacturing Co., Ltd.
发明人:
Chang Chih-Yang,Chu Wen-Ting
申请号:
US201514923589
公开号:
US2017117467(A1)
申请日:
2015.10.27
申请国别(地区):
美国
年份:
2017
代理人:
摘要:
Some embodiments relate to an integrated circuit including a memory cell. The integrated circuit includes a semiconductor substrate and an interconnect structure disposed over the semiconductor substrate. The interconnect structure includes a plurality of dielectric layers and a plurality of metal layers that are stacked over one another in alternating fashion. The plurality of metal layers include a lower metal layer and an upper metal layer disposed over the lower metal layer. A bottom electrode is disposed over and in electrical contact with the lower metal layer. A data storage layer is disposed over an upper surface of bottom electrode. A top electrode is disposed over an upper surface of the data storage layer and is in direct electrical contact with a lower surface of the upper metal layer.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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