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ULTRASONIC PROBE AND METHOD OF MANUFACTURING THE SAME
专利权人:
SAMSUNG MEDISON CO.; LTD.
发明人:
Young-il KIM,Jong-keun SONG,Tae-ho JEON,Min-seog CHOI
申请号:
US15862331
公开号:
US20180198056A1
申请日:
2018.01.04
申请国别(地区):
US
年份:
2018
代理人:
摘要:
Provided are an ultrasonic probe and a method of manufacturing the same. The method includes: forming a plurality of grooves by removing regions of a first insulating layer and a first silicon wafer from a first substrate including the first silicon wafer and the first insulating layer; bonding a second substrate including a second silicon wafer, a second insulating layer, and a silicon thin layer to the first substrate, such that the plurality of grooves turn into a plurality of cavities; removing the second silicon wafer from the second substrate; forming transducer cells on regions of the second insulating layer corresponding to the plurality of cavities; and forming a plurality of unit substrates by cutting the first substrate, the silicon thin layer, and the second insulating layer.
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中国工程科技知识中心
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