Method and system for electron microscope with multiple cathodes

• 收藏
• 分享

专利权人:

CALIFORNIA INSTITUTE OF TECHNOLOGY

发明人:

Zewail Ahmed H.,Baskin John Spencer,Liu Haihua

申请号：

US201514745122

公开号：

US9464998(B2)

申请日:

2015.06.19

申请国别(地区):

美国

年份:

2016

代理人:

Kilpatrick Townsend & Stockton LLP

摘要：

An electron microscope system includes a laser system operable to generate an optical pulse and a pump pulse and a microscope column. The microscope column includes a multiple cathode structure having a plurality of spatially separated cathode regions. Each of the cathode regions are operable to generate an electron pulse. The microscope column also includes an electron acceleration region adjacent the multiple cathode structure, a specimen region operable to support a specimen, and a detector.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/