REED, Bryan W.,DEHOPE, William J.,HUETE, Glenn,LAGRANGE, Thomas B.,SHUTTLESWORTH, Richard M.
申请号：
EP20140731528
公开号：
EP2997591(A4)
申请日:
2014.02.14
申请国别(地区):
欧洲专利局
年份:
2016
代理人:
摘要：
An electron microscope is disclosed which has a laser-driven photocathode and an arbitrary waveform generator (AWG) laser system (“laser”). The laser produces a train of temporally-shaped laser pulses each being of a programmable pulse duration, and directs the laser pulses to the laser-driven photocathode to produce a train of electron pulses. An image sensor is used along with a deflector subsystem. The deflector subsystem is arranged downstream of the target but upstream of the image sensor, and has a plurality of plates. A control system having a digital sequencer controls the laser and a plurality of switching components, synchronized with the laser, to independently control excitation of each one of the deflector plates. This allows each electron pulse to be directed to a different portion of the image sensor, as well as to enable programmable pulse durations and programmable inter-pulse spacings.
