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BEAM EXPOSURE DEVICE
专利权人:
V TECHNOLOGY CO., LTD.
发明人:
Kajiyama Koichi,Ishikawa Shin,Sato Takayuki,Hashimoto Kazushige
申请号:
US201515124701
公开号:
US2017017163(A1)
申请日:
2015.02.26
申请国别(地区):
美国
年份:
2017
代理人:
摘要:
A beam exposure device includes a light-emitting unit for emitting light beams from a plurality of light-emitting positions, a scan unit, an optical condensing system for condensing a spot of the light beams onto a surface to be exposed, and a micro-deflection unit for micro-deflecting the plurality of light beams to expose the space between the beams in the plurality of light beams. The optical condensing system includes a first microlens array arranged between the light-emitting unit and the micro-deflection unit and provided with a plurality of microlenses corresponding to the light-emitting positions; and a second microlens array arranged between the micro-deflection unit and the surface to be exposed and provided with a plurality of microlenses each microlens corresponding to the light-emitting unit.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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