An object of the present invention is to provide a plasma irradiation apparatus that suppresses generation of a spark between a first terminal and a second terminal when the first terminal and the second terminal are attached and detached. A plasma irradiation apparatus has a plasma generator provided with a first terminal, and generates plasma generated by the plasma generator based on power applied to the first terminal and active gas generated by the plasma. And a second terminal 25 detachable from the first terminal, and the first terminal and the second terminal in the first contact state P11 where the first terminal and the second terminal are in contact with each other. Power is applied between the first terminal and the second terminal when the first terminal and the second terminal switch between a first separated state and a first contact state that are separated from each other； And a supply unit 60 that does not apply power to the power supply. [Selection diagram] FIG.【課題】第１端子と第２端子とを着脱する際に第１端子と第２端子との間に火花が発生するのを抑制したプラズマ照射装置を提供する。【解決手段】プラズマ照射装置１は、第１端子４６が設けられたプラズマ発生部を有し、第１端子に印加された電力に基づいてプラズマ発生部にて発生したプラズマ及びプラズマによって生じる活性ガスの少なくとも一方を吐出する照射器具と、第１端子に着脱可能な第２端子２５と、第１端子及び第２端子が互いに接触している第１接触状態Ｐ１１のときに第１端子と第２端子との間に電力を印加し、第１端子及び第２端子が、互いに離間している第１離間状態と第１接触状態との間で切り替わるときに第１端子と第２端子との間に電力を印加しない供給部６０と、を備える。【選択図】図５
