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MEASUREMENT PROCESSING DEVICE, X-RAY INSPECTION DEVICE, MEASUREMENT PROCESSING METHOD, MEASUREMENT PROCESSING PROGRAM, AND STRUCTURE MANUFACTURING METHOD
专利权人:
Nikon Corporation
发明人:
YASHIMA, Hirotomo,HAYANO, Fuminori,KAWAI, Akitoshi
申请号:
EP20150883924
公开号:
EP3267183(A1)
申请日:
2015.03.03
申请国别(地区):
欧洲专利局
年份:
2018
代理人:
摘要:
A measurement processing device used for an X-ray inspection device includes: a region information acquisition unit that acquires first region information based on X-rays passing through a first region that is a part of a first specimen; a storage unit that stores second region information related to a second region of a second specimen, the second region being larger than the first region; and a determination unit that determines whether or not a region corresponding to the first region is included in the second region, based on the first region information and the second region information.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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