USING PIEZOELECTRIC ELECTRODES AS ACTIVE SURFACES FOR ELECTROPLATING PROCESS

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专利权人:

Inc.;Analog Devices

发明人:

Gabriele Vigevani,Xin Zhang

申请号：

US16270481

公开号：

US20200069890A1

申请日:

2019.02.07

申请国别(地区):

US

年份:

2020

代理人:

摘要：

Microelectromechanical systems (MEMS) mesh-membrane nebulizers are described. The MEMS mesh-membrane nebulizers may include a piezoelectric MEMS mesh membrane. The piezoelectric MEMS mesh membrane may include a piezoelectric active layer patterned with openings for making droplets. One electrode of the piezoelectric MEMS mesh membrane may serve as an electrode for electroplating. Activation of the piezoelectric MEMS mesh membrane may generate droplets suitable for delivery of medicines or other uses.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/