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THERMAL CONDITIONING FLUID PUMP
专利权人:
ASML NETHERLANDS B.V.
发明人:
CADEE Theodorus Petrus Maria
申请号:
US201515517485
公开号:
US2017261866(A1)
申请日:
2015.10.05
申请国别(地区):
美国
年份:
2017
代理人:
摘要:
A pump includes a collecting duct to guide a two-phase fluid provided with magnetic field responsive particles, a collecting duct magnet system arranged along the collecting duct and configured to generate a magnetic field in at least a part of the collecting duct, a pumping duct to guide the two-phase fluid, a pumping duct inlet being connected to a collecting duct outlet, and a pumping duct magnet system arranged along the pumping duct and configured to generate a magnetic field in at least a part of the pumping duct. A pump driver is configured to drive the collecting duct magnet system to generate a spatial repetition of collecting duct magnetic fields moving along a length of the collecting duct, and is configured to drive the pumping duct magnet system to generate a spatial repetition of pumping duct magnetic fields moving along a length of the pumping duct.
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