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METAL-NITRIDE THERMISTOR MATERIAL, MANUFACTURING METHOD THEREFOR, AND FILM-TYPE THERMISTOR SENSOR
专利权人:
Mitsubishi Materials Corporation
发明人:
FUJITA, Toshiaki,TANAKA, Hiroshi,NAGATOMO, Noriaki
申请号:
EP20130866344
公开号:
EP2937441(B1)
申请日:
2013.12.03
申请国别(地区):
欧洲专利局
年份:
2017
代理人:
摘要:
Provided are a metal nitride material for a thermistor, which has a high reliability and a high heat resistance and can be directly deposited on a film or the like without firing, a method for producing the same, and a film type thermistor sensor. The metal nitride material for a thermistor consists of a metal nitride represented by the general formula: (Ti 1-v Cr v ) x Al y (N 1-w O w ) z (where 0.0 < v < 1.0, 0.70 ‰¤ y/(x+y) ‰¤ 0.95, 0.45 ‰¤ z ‰¤ 0.55, 0 < w ‰¤ 0.35, and x+y+z = 1), wherein the crystal structure thereof is a hexagonal wurtzite-type single phase.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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