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GAS-BARRIER FILM AND PROCESS FOR PRODUCING GAS-BARRIER FILM
专利权人:
Fujifilm Corporation
发明人:
NAKAMURA Seigo,MOCHIZUKI Yoshihiko,MUKAI Atsushi
申请号:
EP20150768341
公开号:
EP3124227(A1)
申请日:
2015.01.23
申请国别(地区):
欧洲专利局
年份:
2017
代理人:
摘要:
A gas barrier film includes a substrate film and an inorganic layer, in which the inorganic layer includes Si, N, H, and O, the inorganic layer includes a uniform region having a thickness of more than 5 nm at the center in a thickness direction, in the uniform region, a ratio of Si, N, H, and O is uniform and an O proportion is low, and either or both interface-contact regions of the inorganic layer are oxygen-containing regions in which the O proportion represented by the expression "O Proportion: (Number of O/Total Number of Si, N, and O) ×100%" increases in a direction from the uniform region side to an interface and in which a variation of the O proportion per unit thickness is 2%/nm to 8%/nm.
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