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Particle beam transport apparatus and method of transporting a particle beam with small beam spot size
专利权人:
Michel Abs
发明人:
Michel Abs,Szymon Zaremba,Willem Kleeven
申请号:
US12680158
公开号:
US08946659B2
申请日:
2008.09.26
申请国别(地区):
US
年份:
2015
代理人:
摘要:
An apparatus for transporting a charged particle beam is provided. The apparatus may include: means for scanning the charged particle beam on a target, a dipole magnet arranged upstream of the means for scanning, at least three quadrupole lenses arranged between the dipole magnet and the means for scanning, and means for adjusting the field strength of at least three quadrupole lenses in function of the scanning angle of the charged particle beam. The apparatus can be made at least single achromatic.
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