PROBLEM TO BE SOLVED: To provide a tomographic imaging apparatus in which focus adjustment accuracy at the time of tomographic imaging has been improved.SOLUTION: A tomographic imaging apparatus includes a light source for generating light, light branching means for branching the light from the light source into reference light and measurement light, adjustment means for adjusting a focus position of the measurement light, light shielding means for shielding the reference light, and detection means for detecting the intensity of return light acquired by irradiating the measurement light to an object to be inspected in a state that the reference light is shielded by the light shielding means, and the intensity of interference light between the return light and the reference light in a state that the reference light is not shielded by the light shielding means. The adjustment means adjusts a focus position based on the intensity of the return light detected by the detection means in a state that the reference light is blocked by the light shielding means.COPYRIGHT: (C)2016,JPO&INPIT【課題】 断層画像撮像時のフォーカス調整の精度を向上させた断層画像撮像装置を提供する。【解決手段】 光を発生させるための光源と、前記光源からの光を、参照光と測定光とに分岐するための光分岐手段と、前記測定光のフォーカス位置を調整するための調整手段と、前記参照光を遮光するための遮光手段と、前記遮光手段により前記参照光を遮光した状態で前記測定光を被検査物に照射することにより得られる戻り光の強度、及び、前記遮光手段で前記参照光を遮光していない状態で前記戻り光と前記参照光とのの干渉光の強度を検出するための検出手段と、を備え、前記調整手段は、前記遮光手段で前記参照光を遮断した状態で前記検出手段で検出された前記戻り光の強度に基づいて、フォーカス位置を調整する。【選択図】 図1
