PROBLEM TO BE SOLVED: To remove residual hydrogen peroxide efficiently from a chamber for aseptic filling.SOLUTION: In a method of sterilizing the inside of a chamber for aseptic filling which comprises sterilizing the inside of a chamber for aseptic filling by injecting at least hydrogen peroxide solution into the chamber for aseptic filling, after the injection of hydrogen peroxide solution into the chamber for aseptic filling, aseptic heating air is blown into the chamber for aseptic filling to dry a residual hydrogen peroxide solution, and then aseptic non-heating air is blown into the chamber for aseptic filling to ventilate the inside of the chamber for aseptic filling.COPYRIGHT: (C)2014,JPO&INPIT【課題】無菌充填用チャンバ内から残留過酸化水素を効率良く除去する。【解決手段】無菌充填用チャンバ内に少なくとも過酸化水素水を噴射することによって、無菌充填用チャンバ内を滅菌処理する無菌充填用チャンバ内の滅菌方法において、無菌充填用チャンバ内に過酸化水素水を噴射した後、無菌の加熱エアを吹き込んで残留過酸化水素水を乾燥させ、しかる後に、無菌の非加熱エアを吹き込んで無菌充填用チャンバ内の換気を行う。【選択図】図4