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Electron microscope
专利权人:
JEOL LTD.;JEOL SYSTEM TECHNOLOGY CO., LTD.
发明人:
FURUKAWA HIROMITSU,SHIMIZU MIYOKO
申请号:
US20040876300
公开号:
US2005029452(A1)
申请日:
2004.06.24
申请国别(地区):
美国
年份:
2005
代理人:
摘要:
An electron microscope is offered which can analyze the three-dimensional structure of a specimen without sectioning it by making use of computerized tomography. The microscope has solved the problems intrinsic to the microscope and permits application of computerized tomography to general cases. A series of transmission images is obtained by tilting the specimen by plural angles. Two-dimensional correlation processing is performed between each of the series of images and a reference image. The same field of view is selected and extracted. Thus, positional deviation of the specimen is corrected.
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