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ANGULAR VELOCITY SENSOR, SENSOR ELEMENT, AND MULTI-AXIS ANGULAR VELOCITY SENSOR
专利权人:
KYOCERA CORPORATION
发明人:
SOEJIMA, Munetaka
申请号:
WO2017JP26392
公开号:
WO2018021167(A1)
申请日:
2017.07.21
申请国别(地区):
世界知识产权组织国际局
年份:
2018
代理人:
摘要:
An angular velocity sensor has a piezoelectric body, a drive circuit, and a detection circuit. The piezoelectric body has a pair of frames, a pair of drive arms, and a pair of detection arms. The pair of frames are mutually facing in the y axis direction of a Cartesian coordinate system xyz. The pair of drive arms each bridge the pair of frames and are mutually facing in the x axis direction. The pair of detection arms extend in the y axis direction from the pair of frames at positions between the pair of drive arms in the x axis direction. The drive circuit applies voltages of mutually inverse phases to the pair of drive arms, such that the pair of drive arms bend to mutually opposite sides in the x axis direction and vibrate. The detection circuit detects signals generated as a result of bending deformation in the z axis direction of the pair of detection arms.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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