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ELECTRONIC MICROSCOPE, ELECTRONIC-MICROSCOPE IMAGE RECONSTRUCTION SYSTEM, AND ELECTRONIC-MICROSCOPE IMAGE RECONSTRUCTION METHOD
专利权人:
Hitachi High-Technologies Corporation
发明人:
KUBO, Takashi,KOBAYASHI, Hiroyuki
申请号:
EP20110844611
公开号:
EP2648206(A4)
申请日:
2011.10.14
申请国别(地区):
欧洲专利局
年份:
2018
代理人:
摘要:
There is provided an image-reconstruction system capable of implementing a multi-axes reconstruction technique for lessening a burden on the part of a user, and precluding artifacts high in contrast, contamination of a sample, and restrictions imposed on a sample for use, occurring due to use of markings. A plurality of tilt-images photographed by tilting a sample at sample-tilt axes, differing from each other; are acquired, misregistration is corrected by a rotation step-angle, a rotated object under observation is tilted in angle-steps, differing from each other, to pick up images thereof, two reconstruction images obtained by correcting respective misregistrations of two reconstruction images created from respective tilt-image groups are created, and one reconstruction image is created by superimposing one of the two reconstruction images on the other.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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