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ELECTRON MICROSCOPE AND SAMPLE HEATING METHOD
专利权人:
CENTRAL RES INST OF ELECTRIC POWER IND
发明人:
YAMADA SUSUMU,KISHIDA HARUO,KUSANAGI HIDEO
申请号:
JP19990221781
公开号:
JP2001052640(A)
申请日:
1999.08.04
申请国别(地区):
日本
年份:
2001
代理人:
摘要:
PROBLEM TO BE SOLVED: To heat a sample in an electron microscope to a higher temperature than conventional. SOLUTION: An electron microscope is structured so that a sample 21 to be observed can be heated without changing the lens conditions at observing, wherein a heating electron beam 5 at an accelerating voltage loser than an observing electron beam 6 is applied on an objective lens 3 as an electron lens surrounding the sample 2 placed on the optical path of the observing electron beam 6, and a heating electron beam source 1 heats the sample 2 through the lens action part of the electron lens 3. The heating of sample 2 is performed by converging the heating electron beam 5 using the acting magnetic field of the objective lens 3 for the observing electron beam 6.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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